Measurement Features

FilmTek™

4000 / 4500

Index of Refraction折射率
(at 2µm thickness)

±0.00002

Thickness Measurement Range

膜厚范圍

3nm-350µm

Maximum Spectral Range (nm)

大光譜范圍

190-1700nm

Standard Spectral Range (nm)

標準光譜范圍

380-1000nm

Reflection

反射

Yes

Transmission

透射

 Yes(4500)

Spectroscopic Ellipsometry

橢圓光譜技術(shù)

No 

Power Spectra Density

功率譜密度

Yes

Multi-angle Measurements

多角度測量(DPSD)

Yes

TE & TM Components of Index

TE和TM成分指數(shù)

Yes

Multi-layer thickness

多層厚度

Yes

Index of Refraction

折射率

Yes

Extinction (absorption) Coefficient

消光(吸收)系數(shù)

Yes

Energy band gap

能帶隙

Yes

Composition

組成

Yes

Crystallinity

結(jié)晶度

Yes

Inhomogeneous Layers

非均勻?qū)?/span>

Yes

Surface Roughness

表面粗糙度

Yes